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TECHNICAL JOURNAL
Technical Journal是由以真空技術為核心的ULVAC旗下的技術人員所撰寫的技術資料，欲免費索取相關資訊，請填寫以下表格，我們將提供PDF英文版。
No.85E June/2023
01
Filling Technology of Insulating Layers by Phase Position Control
02
ULVAC's Efforts to Ensure Cleanliness of Organic Electro Luminescence Manufacturing Equipment
03
22-inch Cryopump that Achieves Both Cost Reduction and Energy Saving
04
Development of Batch Type Isotropic Gas SiO₂ Etching System Using HF Gas
05
Development of Surface Treatment VACAL®-Z for Vacuum Equipment Using Corrosive Gases
06
Development of Low Damage Sputtering Process for OLED Devices
07
Development of Sputtering Module "SEGul" for Forming GaN Epitaxial Thin Films
08
New Inductively Coupled Plasma Source for uGmni Etching Module - "ISM-duo"
No.84E June/2021
01
Deposition Technology for Cu Interconnect of Semiconductor Devices
No.83E January/2020
01
Manufacturing Technology for Functional Material Films for Auto motive MEMS Sensors
